CMOS Cantilever Sensor Systems

CMOS Cantilever Sensor Systems

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This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.5.22h). Finally, the photoresist is removed with an oxygen plasma (Fig. 5.22i). ... 5.23c shows a SEM photograph of tips etched from silicon on a test substrate. The tips are ... In addition, it controls the compensation of sensor offsets and compensates for the SAC between the heater and the piezoresistive Wheatstone bridge.

Title:CMOS Cantilever Sensor Systems
Author: D. Lange, O. Brand, Henry Baltes
Publisher:Springer Science & Business Media - 2002-07-23

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